| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacity type physical quantity sensor which performs self diagnosis regardless of a detection range.SOLUTION: Auxiliary electrodes 71, 72 are formed from a part facing a movable electrode 24 to a part facing a displacement possible area of the movable electrode 24 in second substrates 11, 201. When performing self diagnosis, predetermined potential is applied to the auxiliary electrodes 71, 72 for enhancing density of an electrical flux line formed between fixed electrodes 31, 41 positioned in a direction where displacing the movable electrode 24 and the movable electrode 24. |
