RADIATION DETECTION APPARATUS AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a technique advantageous for forming a scintillator layer on a sensor substrate with an evaporation method after coupling the sensor substrate and a support substrate via a coupling layer. ! SOLUTION: A method of manufacturing a radiation detection apparatus includes: a process in which a sensor substrate formed with a photoelectric conversion part and a support substrate are arranged via a coupling material; a process in which a coupling layer for coupling the sensor substrate and the support substrate is formed by curing the coupling material; and a process in which a scintillator layer is formed on the sensor substrate with an evaporation method. The coupling layer includes particles and an adhesive. The particles are arranged so that a cavity is formed therebetween. The coupling layer has such heat resistance that coupling of the sensor substrate and the support substrate by the coupling layer is maintained in the process for forming the scintillator layer. ! COPYRIGHT