METHOD OF COATING A SUBSTANCE ON A RF DEVICE AND SPUTTERING APPARATUS USED IN THE SAME

摘要

The present invention relates to a method to coat an RF device by a drying method and a sputtering apparatus used in the same. The sputtering apparatus includes: a supporting section where a coating target for the RF device is placed; a first target formed of a material to coat the coating target; and a second target arranged apart from the first target. During the coating of the coating target, electric power is supplied to each of the first target and the second target.