| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxygen concentration measurement device being compact in size and also capable of controlling the supply amount of a reference gas with high accuracy.SOLUTION: An oxygen concentration measurement device according to the present invention has a zirconia element connected to an external electrode on a side in contact with a measurement gas to be measured and an internal electrode on a side in contact with a reference gas, the zirconia element generating an electromotive force in accordance with a difference between the oxygen concentration of the measurement gas and the oxygen concentration of the reference gas, and measures an oxygen concentration in accordance with the magnitude of the generated electromotive force. The oxygen concentration measurement device is provided with a reference gas supply part having a vibrator vibrating in accordance with an electric signal, the reference gas supply part being connected to a supply port through which the reference gas is supplied and supplying the reference gas by a vibration corresponding to the electric signal of a vibrator, for example, a piezoelectric element. |
