| 摘要 |
PROBLEM TO BE SOLVED: To accurately drive a stage in a desired direction during exposure and alignment.SOLUTION: During exposure, positional information of a stage WST is measured by a Y head 64 and an X head 66 which oppose Y scales 39Yand 39Yand X scales 39Xand 39Xand on the basis of measurement information of an encoder system including the heads 64 and 66, movement of the stage WST is controlled while compensating for a measurement error of the encoder system caused by displacement of the stage WST in a direction different from directions X and Y2. During alignment, positional information of the stage WST is measured by Y heads 64yand 64yof the encoder system opposing the Y scales 39Yand 39Y, respectively, and on the basis of measurement information of the encoder system, the movement of the stage WST is similarly controlled. |
