| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cleaning liquid regeneration method which can separate water contaminated in the cleaning liquid from the cleaning liquid with smaller heat energy.SOLUTION: A cleaning liquid to which water is contaminated is stored in an evaporation tank 11. The inside of the evaporation tank 11 is decompressed to pressure in which water boils and the component of the cleaning liquid does not boil, and in an upper space of the evaporation tank 11, a cooling body 12 having temperature higher than the boiling point of the water at the pressure is provided, for discharging gas phase from the evaporation tank 11. Thereby without boiling the cleaning liquid component, water can be separated from the cleaning liquid. Therefore, heat energy consumption is suppressed.</p> |
