METHODS INVOLVING COLOR-AWARE RETARGETING OF INDIVIDUAL DECOMPOSED PATTERNS WHEN DESIGNING MASKS TO BE USED IN MULTIPLE PATTERNING PROCESSES

摘要

One illustrative method disclosed herein includes the steps of decomposing an initial overall target exposure pattern into at least a first decomposed sub-target pattern and a second decomposed sub-target pattern, performing first and second retargeting processes on the first and second decomposed sub-target patterns while using the other sub-target pattern as a reference layer, respectively, to thereby define retargeted first and second decomposed sub-target patterns, respectively, and, after performing the first and second retargeting processes, performing at least one process operation to determine if each of the retargeted first decomposed sub-target pattern and the retargeted second decomposed sub-target pattern is in compliance with at least one design rule.

主权项

1. A method, comprising:
decomposing an initial overall target exposure pattern into at least a first decomposed sub-target pattern and a second decomposed sub-target pattern, wherein each of said first and second decomposed sub-target patterns comprise at least one feature; performing a first retargeting process on said first decomposed sub-target pattern to thereby define a retargeted first decomposed sub-target pattern while using said second decomposed sub-target pattern as a reference layer during said first retargeting process; performing a second retargeting process on said second decomposed sub-target pattern to thereby define a retargeted second decomposed sub-target pattern while using said first decomposed sub-target pattern as a reference layer during said second retargeting process; and after performing said first and second retargeting processes, performing at least one process operation to determine if each of said retargeted first decomposed sub-target pattern and said retargeted second decomposed sub-target is in compliance with at least one design rule.