| 摘要 |
The invention relates to a method for producing granular polysilicon in a fluidized bed reactor, having the steps of fluidizing silicon particles by means of a gas flow in a fluidized bed, said gas flow being heated to a temperature of 850-1100°C by a heating device, adding a silicon-containing reaction gas by means of at least one nozzle, and depositing silicon onto the silicon particles. The invention is characterized in that in at least 56% of an axially symmetrical region about a nozzle opening of the at least one nozzle, a reaction gas concentration equals more than 75% of a maximum concentration of the reaction gas (10 to 50 mol%), a fluidized bed temperature is higher than 95% of a fluidized bed temperature outside of the axially symmetrical region (850-1100°C), and a solids concentration is more than 85% of a solids concentration at the edge of the fluidized bed (55 to 90 vol%). |
