发明名称 Drawing Data Correction Apparatus and Drawing Apparatus
摘要 <p>A scanning data correcting device and a drawing device are provided. In the scanning data correcting device, a correction method selection part selectively uses a plurality of data correction parts according to received correction information, so as to correct drawing data. The drawing device draws a substrate based on the corrected drawing data (DD). Thus a correction method is selected according to the substrate to be manufactured. Therefore, the drawing data can be corrected in a way suitable for subsequent processes or application.</p>
申请公布号 KR101480589(B1) 申请公布日期 2015.01.08
申请号 KR20110117264 申请日期 2011.11.11
申请人 发明人
分类号 G03F7/00;G03F7/20 主分类号 G03F7/00
代理机构 代理人
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