| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece holding fixture by which a thin semiconductor substrate and a semiconductor substrate having topography can be surely and carefully held and fixed.SOLUTION: A workpiece holding fixture includes: a holding body 3 fixed onto a carrier 1; and a suction structure 6 in which a soft material for sucking a semiconductor substrate 4 is specified on a holding side surface 7 of the holding body 3. The suction structure 6 has one or more paths 12 direction in a peripheral direction of the holding body 3 and/or the semiconductor substrate, and at least one path 12 composed of a bulge part 11 and a hollow 10 extends so as to be directed to the outside from the center Z of the holding body 3. |
