主权项 |
1. A thermal displacement correction method for a machine tool including a support and a movable body that is movably supported by the support and that moves relative to the support based on a command position, the thermal displacement correction method comprising:
estimating a thermal displacement of the support and a thermal displacement of the movable body independently of each other through a thermal displacement estimation process; acquiring a displacement of an attachment position of a scale that detects a position of the movable body, based on the thermal displacement of the support; acquiring an actual position of the movable body relative to the support after thermal deformation of the support, based on the displacement of the attachment position of the scale, and based on the position of the movable body which is detected by the scale; computing a degree of inclination of the movable body at the actual position of the movable body, based on the actual position of the movable body and the thermal displacement of the support; acquiring a resultant displacement that is a resultant of the thermal displacement of the support and the thermal displacement of the movable body, based on the thermal displacement of the movable body, the actual position of the movable body and the degree of inclination of the movable body; computing a correction value for the command position of the movable body, based on the resultant displacement; and correcting the command position of the movable body based on the correction value. |