IRRADIATION SYSTEM WITH ION BEAM/CHARGED PARTICLE BEAM,申请号KR20050099010-传众专利搜索

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发明名称	IRRADIATION SYSTEM WITH ION BEAM/CHARGED PARTICLE BEAM
摘要
申请公布号	KR20060060557(A)	申请公布日期	2006.06.05
申请号	KR20050099010	申请日期	2005.10.20
申请人	SMITOMOEATONNOVA CORPORATION	发明人	YAGITA TAKANORI;NISHI TAKASHI;SUGITANI MICHIRO;MURAKAMI JUNICHI;TSUKIHARA MITSUKUNI;KABASAWA MITSUAKI;ISHIKAWA MASAKI;KUDO TETSUYA
分类号	H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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