摘要 |
A MEMS micro-mirror assembly (250, 300, 270, 400) comprising, a MEMS device (240) which comprises a MEMS die (241) and a magnet (231); a flexible PCB board (205) to which the MEMS device (240) is mechanically, and electrically, connected; wherein the flexible PCB board (205) further comprises a first extension portion (205b) which comprises a least one electrical contact (259a,b) which is useable to electrically connect the MEMS micro-mirro rassembly (250, 300, 270, 400) to another electrical component). There is further provided a projection system comprising such a MEMS micro-mirror assembly (250, 300, 270, 400). |
主权项 |
1. A MEMS micro-mirror assembly comprising
a MEMS device which comprises a MEMS die and a magnet; a flexible PCB board to which the MEMS device is mechanically, and electrically, connected; wherein the flexible PCB board further comprises a first extension portion, which is defined by a portion of the flexible PCB board, which comprises a least one electrical contact, which is useable to electrically connect the MEMS micro-mirror assembly to another electrical component, wherein the MEMS device is mounted on the flexible PCB board. |