NANO-PORE CYCLIC ARRANGEMENT MANUFACTURING METHOD AND DEVICE THEREOF

摘要

There is provided a minute structure manufacturing method for manufacturing a cyclic minute structure on a transparent material by applying a ultra-short pulse laser such as a femto-second laser pulse to the transparent material. The minute structure manufacturing method includes a step for applying the ultra-short pulse laser so that a filament is formed in the transparent material and the filament reaches the bottom of the transparent material. Thus, it is possible to effectively and accurately manufacture a minute structure in a transparent material such as glass.