发明名称 TARGET, ADAPTED TO AN INDIRECT COOLING DEVICE, HAVING A COOLING PLATE
摘要 The invention relates to a device for cooling a target with a component which comprises a cooling duct and a further thermally conductive plate which is connected releasably to the cooling side of the component, wherein the cooling side is that side on which the cooling duct is effective, characterized in that, between the further thermally conductive plate and the cooling side of the component, provision is made of a first self-adhesive carbon film which is extensively adhesively bonded in a self-adhesive manner to a side of the further thermally conductive plate which faces the cooling side.
申请公布号 CA2916770(A1) 申请公布日期 2015.01.08
申请号 CA20142916770 申请日期 2014.06.30
申请人 OERLIKON SURFACE SOLUTIONS AG, TRUBBACH 发明人 KURAPOV, DENIS;KRASSNITZER, SIEGFRIED
分类号 C23C14/34;H01J37/34 主分类号 C23C14/34
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