| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor for facilitating the enhancement of angular velocity detection sensitivity. <P>SOLUTION: This angular velocity sensor 1 comprises a base 2 having an X-Y substrate surface parallel to an X-Y plane, frame-like beams 4 disposed in a poised state above the substrate surface of the base 2, a beam-part supporting/fixing part for supporting the beams 4 in a both-end supported beam shape on the base 2 by means of support parts 5a and 5b, a weight part 7 (7a and 7b) disposed in a poised state above the substrate surface of the base 2, and a link part 8 for supporting the weight part 7 (7a and 7b) in a cantilever beam shape on the frame-like beams 4. The weight part 7 has a structure displaceable by external force in three axis directions, that is, X-axis, Y-axis, and Z-axis directions, owing to bending deformation of the frame-like beams 4. A weight-part drive means 22 is provided for driving/vibrating the weight part 7 in the Z-axis direction. The frame-like beams 4 is provided with an around-Y-axis angular velocity detection part for detecting an angular velocity based on the bending deformation of the frame-like beams 4 owing to the displacement of the weight part 7 caused by Coriolis force in the X-axis direction generated by its rotation around the Y-axis direction with the frame-like beams 4 driven/vibrated in the Z-axis direction. <P>COPYRIGHT: (C)2007,JPO&INPIT |
