ELECTRODE FOR PLASMA REACTOR

摘要

PROBLEM TO BE SOLVED: To solve such a problem that when an electrode consisting of porous silicon carbide is used as the electrode to be used in a plasma reactor, silicon carbide is excellent in mechanical stability but is not always fabricated easily and therefore it is difficult to fabricate silicon carbide into a cylindrical shape corresponding to a shape of the plasma reactor.

SOLUTION: The electrode for the plasma reactor consists of porous nickel or copper. A dielectric is arranged on at least one surface of the electrode for the plasma reactor.

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