摘要 |
<p>Disclosed are methods of lithography using a tip array having a plurality of pens attached to a backing layer, where the tips can comprise a metal, metalloid, and/or semi-conducting material, and the backing layer can comprise an elastomeric polymer. The tip array can be used to perform a lithography process in which the tips are coated with an ink (e.g., a patterning composition) that is deposited onto a substrate upon contact of the tip with the substrate surface. The tips can be easily leveled onto a substrate and the leveling can be monitored optically by a change in light reflection of the backing layer and/or near the vicinity of the tips upon contact of the tip to the substrate surface.</p> |
申请人 |
NORTHWESTERN UNIVERSITY |
发明人 |
MIRKIN, CHAD, A.;SHIM, WOOYOUNG;BRAUNSCHWEIG, ADAM, B.;LIAO, XING;CHAI, JINAN;LIM, JONG, KUK;ZHENG, GENGFENG;ZHENG, ZIJIAN |