| 摘要 |
Disclosed in the present invention is a method for preparing trisilylamine. In an embodiment, the method comprises the steps of: providing a reaction mixture of trisilylamine and monochlorosilane to a reactor, in which the reaction mixture exists at a temperature and pressure sufficient to provide liquid phase trisilylamine and the reaction mixture does not substantially contains added solvents; making the reaction mixture come in contact with ammonium to provide a crude mixture containing trisilylamine and ammonium chloride solids, in which monochlorosilane is stoichiometrically excessive with respect to ammonia; refining the crude mixture to provide trisilylamine, in which trisilylamine of 90% or higher purity is produced; and removing ammonium chloride solid from a random reactor. |
