| 摘要 |
Such transducers include a back-plate having at least one backplate 304 coupled to a backplate electrode 303, with a plurality of holes 314 in the back-plate electrode corresponding to a plurality backplate holes 312. The membrane electrode 302 has at least one opening 313 wherein, at least part of the area of the opening corresponds to the area of at least one back-plate hole, and there is no hole in the flexible membrane 301 at said opening in the membrane electrode. There may be a plurality of such openings. The openings allow a reduction in the amount of membrane electrode material, e.g. metal, that may undergo plastic deformation and permanently deform the membrane. The openings are at least partly aligned with the backplate holes to minimise any loss of capacitance. The invention is particularly applicable to MEMS transducers having a flexible membrane 301 composed from crystalline or polycrystalline material and the membrane electrode is metal or a metal alloy. |
