| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of generating a heat treatment atmospheric gas capable of inexpensively manufacturing a mixed gas of nitrogen, hydrogen and water of a stable composition while using a nitrogen gas manufactured by a cold separation method, as a raw material. SOLUTION: The method of generating the heat treatment atmospheric gas includes a process for generating an oxygen-mixed nitrogen gas having a prescribed oxygen concentration by mixing an oxygen-containing gas to the material nitrogen gas generated by a pressure fluctuation adsorptive separation-type nitrogen generating means or a separation membrane-type nitrogen generating means, a process for adding a prescribed amount of hydrogen gas to the oxygen-mixed nitrogen gas to prepare the material mixed gas, and a process for preparing the heat treatment atmospheric gas introduced into a heat treatment furnace by producing the water by catalytic reaction of oxygen and hydrogen in the material mixed gas. COPYRIGHT: (C)2011,JPO&INPIT |
