| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a multijunction solar battery that can realize a four junction solar battery and can have the device area enlarged. <P>SOLUTION: The manufacturing method of the multijunction solar battery has a process for disposing a nucleation site on a substrate 2, made of a first semiconductor, and feeding thereto a first raw-material gas to grow a semiconductor 3 in the form of wires on the nucleation site; and has a process for feeding third and fourth raw-material gases making semiconductors 3, 4 grow in the form of wires, respectively, the semiconductor 4 on the semiconductor 3, and the semiconductor 5 on the semiconductor 4. Alternatively, the method has a process for disposing a nucleation site on a substrate 6, and feeding thereto a first raw-material gas to grow a semiconductor 2a in the form of wires on the nucleation site; and has a process for feeding second-fourth raw-material gases to semiconductors 2a, 3, 4 to grow in the form of wires, respectively the semiconductor 3 on the semiconductor 2a, and the semiconductor 4 on the semiconductor 3, and further, the semiconductor 5 on the semiconductor 4. The closer or more remote the portions of the semiconductors are to or from the substrates 2, 6, the wider or the narrower their band gaps become. The nucleation site comprises the catalyzer particles of Au, etc. The semiconductors 2, 2a are Ge, the semiconductor 3 is InGaAs, and further, the semiconductor 4 is GaAs, and the semiconductor 5 is AlGaAs. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
