| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum component such as a vacuum flange and a vacuum operation component having characteristics such as high hardness, high sliding characteristics and low gas-emission characteristics effective for components used under an ultra-high vacuum environment, and exhibiting high durability. SOLUTION: In the vacuum component used for an operation part in vacuum, at least a surface layer is made of a carbon-doped titanium oxide layer, and carbon is doped in the Ti-C bond state, and Vickers hardness of the carbon-doped titanium oxide layer is 300 or more. COPYRIGHT: (C)2010,JPO&INPIT |
