| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle substrate formed of silicon or the like which is good in covering performance preventing a liquid droplet delivering surface and an inner wall of a nozzle hole from erosion with a delivering liquid, and is excellent in durability and delivering characteristics. SOLUTION: The nozzle substrate 1 formed of silicon has the nozzle holes 11, having a delivering waterproof protective film A formed continuing from a surface 1a of a liquid droplet delivering side of the nozzle hole 11 to a surface 1b of the opposite side to the surface of the liquid droplet delivering side through the inner wall 11c of the nozzle hole 11. The delivering waterproof protective film A is a silicon oxide film formed by thermal oxidation processing. Its manufacturing method has a process for forming a first silicon oxide film 101 by thermal oxidation, a process for carrying out activated joining of a supporting substrate 500 of silica glass, a process for thinning, a process for forming the nozzle hole 11 from a surface 100b of the thinned side, and a process for preparing the delivering waterproof protective film A by performing thermal oxidation processing and forming a second silicon oxide film 103 from the surface 100b of the thinned side to the inner wall 1c of the nozzle hole 11. COPYRIGHT: (C)2010,JPO&INPIT |
