发明名称 WAFER BONDER HAVING HOLDER AND WAFER BONDING METHOD
摘要 <p>The present invention provides a wafer bonder capable of stably aligning a wafer. The wafer bonder according to one aspect of the present invention includes a first stage on which the wafer is mounted, a second stage which faces the first stage, a first holder which supports the wafer, is installed to vertically move, and includes a support protrusion, and a second holder which is located on the upper side of the first holder and includes a support protrusion which supports the wafer to be closely attached to the second stage.</p>
申请公布号 KR20150001930(A) 申请公布日期 2015.01.07
申请号 KR20130075031 申请日期 2013.06.28
申请人 HUTEM CO., LTD. 发明人 SHIN, HONG SOO;DO, HYUN JUNG;KIM, JIN WON
分类号 H01L21/02;H01L21/50 主分类号 H01L21/02
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