发明名称 METHOD FOR FABRICATING LIGHT-EMITTING ELEMENT AND LIGHT-EMITTING ELEMENT
摘要 Provided are a method for fabricating a light-emitting element with a high efficiency and a long lifetime, and a light-emitting element. In manufacturing a light-emitting element having a structure constituted by inserting an EL layer between a pair of electrodes, a first electrode of a light-emitting element is formed on a substrate, and a second electrode is formed by depositing an organic compound included in the EL layer. Also, the organic compound included in the EL layer is deposited after confirming that specific impurity components are within a predetermined range by performing measurement with a mass spectrometer equipped in a film forming chamber before or during deposition.
申请公布号 KR20150002534(A) 申请公布日期 2015.01.07
申请号 KR20140079939 申请日期 2014.06.27
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;SEO SATOSHI;SUZUKI TSUNENORI
分类号 C09K11/06;H01L51/56 主分类号 C09K11/06
代理机构 代理人
主权项
地址