| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a novel polishing method to obtain a metal having a low surface roughness. <P>SOLUTION: Disclosed is a metal polishing method, and the method 1 includes: immersing a polishing object metal in a polishing liquid; polishing the polishing object metal while irradiating the polishing liquid with UV light. The polishing liquid 2 consists of at least one kind of aluminum-oxide particles and titanium-oxide particles, suspended in water solution of a fluorescence material presented in a chemical formula (I). <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
