SYSTEM FOR CONTROLING SEMICONDUCTOR MANUFACTURE EQUIPMENT AND STATISTICAL PROCESS CONTROL METHOD AT THE SAME

摘要

A system for managing semiconductor fabricating equipments to increase or maximize reliability, and a statistical process management method thereof are provided to increase or maximize the reliability by managing process of all lots even if a part of variables are not measured. A plurality of unit process devices(10) perform various kinds of semiconductor unit processes. A plurality of measurers(20) measure pattern property of a wafer finishing each unit process in each process device. A host computer(30) detects abnormality of the unit process by using T-square statistics, which is calculated by a plurality of process parameters corresponding to the measured pattern property of the wager.