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发明名称
XE PREAMORPHIZING IMPLANTATION
摘要
申请公布号
KR100880687(B1)
申请公布日期
2009.01.30
申请号
KR20047001673
申请日期
2002.04.05
申请人
发明人
分类号
H01L21/20;H01L21/265;H01L21/324;H01L21/336;H01L29/78;H01L29/786;(IPC1-7):H01L21/265
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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