SOLAR BATTERY CELL AND PROCESS FOR PRODUCING THE SAME

摘要

Forming an impurity diffusion layer of the second conductivity type and an antireflective film on one surface side of a semiconductor substrate of the first conductivity type; applying the first electrode material containing glass onto the antireflective film; forming a passivation film on the other surface side of the semiconductor substrate; forming multiple openings in at least part of the passivation film so as to reach the other surface side of the semiconductor substrate; applying a second electrode material containing impurity elements of the first conductive type to fill the openings and not to be in contact with the second electrode material of adjacent openings; applying a third electrode material onto the passivation film so as to be in contact with the entire second electrode material that is applied; forming at a time, by heating the semiconductor substrate at a predetermined temperature after applying the first electrode material and the third electrode material, the first electrodes that penetrate the antireflective film and are electrically connected to the impurity diffusion layer, a high-concentration region on the other surface of the semiconductor substrate in which impurities of the first conductive type are diffused in higher concentration than in the another area of the semiconductor substrate, and the second electrodes and third electrode that are electrically connected to the high-concentration region.