发明名称 EPITAXIAL WAFER
摘要 <p>The present invention relates to an epitaxial wafer. The epitaxial wafer includes an epitaxial structure which includes a substrate, a buffer layer which is formed on the substrate, and an active layer which is formed on the buffer layer. The active layer is formed on the buffer layer and includes a first section in which a doping concentration is gradually reduced far away from the buffer layer and a second section which is formed on the first section and maintains a preset doping concentration.</p>
申请公布号 KR20150002066(A) 申请公布日期 2015.01.07
申请号 KR20130075383 申请日期 2013.06.28
申请人 LG INNOTEK CO., LTD. 发明人 KIM, JI HYE;HWANG, MIN YOUNG;KANG, SEOK MIN
分类号 H01L21/20 主分类号 H01L21/20
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