圧電薄膜、圧電素子および圧電素子の製造方法

摘要

Provided are a bismuth-based piezoelectric material whose insulation property is improved while its performance as a piezoelectric body is not impaired, and a piezoelectric device using the piezoelectric material. The piezoelectric material includes a perovskite-type metal oxide represented by the following general formula (1): Bix(Fe1-yCoy)O3  (1) where 0.95≦̸x≦̸1.25 and 0≦̸y≦̸0.30, and a root mean square roughness Rq (nm) of a surface of the piezoelectric material satisfies a relationship of 0