| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sputtering system in which the change command of power source control is transmitted synchronously with the timing of a process treatment change to eliminate an error by the delay of a serial communication, and which has high precision and high reproducibility. <P>SOLUTION: The sputtering system includes a power source control unit having a function of transmitting a power source condition reading-out signal in which the reading-out of the condition of a power source performing the feed of electric power to a cathode part is carried out at a prescribed time cycle and an electric power application stop signal stopping the feed of electric power to the cathode part at a prescribed timing, to the power source by a serial communication. The power source control unit transmits a reading-out stop signal for stopping the transmission of the signal of the reading-out in the power source condition to stop the reading-out treatment in the condition of the power source, and thereafter, transmits an electric power application stop signal. <P>COPYRIGHT: (C)2011,JPO&INPIT |
