COOLING DEVICE, ILLUMINATION OPTICAL SYSTEM, EXPOSURE EQUIPMENT, AND GOODS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technology which is advantageous to inhibiting harmful effect on the effective light source distribution and achieving high cooling efficiency of a light source.SOLUTION: A cooling device which cools heat generated by a light source part is provided. The cooling device includes: a cooling part provided outside a path of light from the light source part; and a heat pipe which connects a heating part of the light source part with the cooling part. The heat pipe is also used as an electrode wire.SELECTED DRAWING: Figure 2