| 摘要 |
PURPOSE: To provide a method for generating drawing data, using a data format that can reduce the amount of data even when it is necessary to define a dose amount according to a minute size.CONSTITUTION: A method for generating drawing data according to one aspect of the present invention is a method for generating drawing data to be input to a drawing apparatus that draws a figure pattern on a specimen by using a charged particle beam. In the method, the drawing data is generated on the basis of a data formant that sequentially defines figure information on a figure pattern, and dose amount information indicating one of a dose amount and a dose modulation rate for a position of each of corners of the figure pattern before and after the figure information is defined.SELECTED DRAWING: Figure 3 |
