Method of manufacturing a template matching template, as well as a device for manufacturing a template

摘要

Provided is a method of manufacturing a template matching template, as well as a device for manufacturing a template, by both of which high matching accuracy can be stably ensured without being affected by factors such as process variations. As an embodiment of the above, a method of manufacturing a template matching template, as well as a relevant device, is proposed by both of which a template memorized in advance and an image acquired by a microscope are compared, thereby identifying a desired position, and by which a plurality of images at the identified location are acquired by template matching, and the aforementioned plurality of images are added and averaged, thereby manufacturing a new template.

主权项

1. A template-matching template creation method in which a desired location is identified by comparing a template stored in advance and an image acquired by a microscope, said template-matching template creation method comprising steps of:
accumulating a plurality of image data of a plurality of patterns formed under a same fabrication condition and at different fabrication timings, the plurality of image data having been acquired by said microscope, and the plurality of patterns having a same design; performing a template-matching process using a reference image and each of the accumulated plurality of image data of the plurality of patterns; and creating a template for template-matching by calculating an average of the plurality of image data of a predetermined number of patterns, locations of which are identified by the template-matching process while excluding old image data which has been used for the average calculation from the average calculation and including new image data of a pattern formed at a different fabrication timing in the average calculation.