Substrate structure, method of forming the substrate structure and chip comprising the substrate structure

摘要

A groove structure formed on a surface of a substrate. The groove structure includes a lateral epitaxial pattern in a cross section perpendicular to the surface, which has: a first edge inclined to the surface; a second edge adjacent to first edge and parallel to the surface; a third edge parallel to the first edge, having a projection on the surface covering the second edge; and a fourth edge adjacent to the third edge. A first intersection between the second edge and the third edge on the second edge and an injection of a second intersection between the third edge and the fourth edge on the second edge are located on two sides of a third intersection between the first edge and the second edge, or the injection of the second intersection between the third edge and the fourth edge on the second edge coincides with the third intersection.

主权项

1. A substrate structure, comprising:
a substrate; and at least a groove structure formed on a surface of the substrate, the groove structure having a lateral epitaxial pattern in a cross section perpendicular to the surface of the substrate, wherein the lateral epitaxial pattern comprises: a first edge inclined with respect to the surface of the substrate; a second edge adjacent to the first edge and parallel to the surface of the substrate; a third edge parallel to the first edge, having a projection on the surface of the substrate at least entirely covering the second edge; and a fourth edge adjacent to the third edge, in which the second edge is the bottom of the groove structure; and a first intersection point between the second edge and the third edge on the second edge and an injection of a second intersection point between the third edge and the fourth edge on the second edge are located on two sides of a third intersection point between the first edge and the second edge, or the injection of the second intersection point between the third edge and the fourth edge on the second edge coincides with the third intersection point between the first edge and the second edge.