POSITION DETECTING APPARATUS, SUBSTRATE MANUFACTURING APPARATUS, POSITION DETECTING METHOD, AND MANUFACTURING METHOD OF SUBSTRATE

摘要

The present invention provides technology capable of accurately calculating an actual position of an alignment mark from a position of an alignment mark on an image imaged by an imaging unit. A position detecting apparatus of the present invention includes: an imaging unit, a memory unit and a control unit. The imaging unit is movable along a reference plane in a state of being opposite to the reference plane, and images an alignment mark on the reference plane. The memory unit is recorded by a conversion information to set a magnification of an image imaged by the imaging unit in accordance to the position of the imaging unit. The control unit calculates the position of the alignment mark on the reference plane using the conversion information recorded in the memory unit from the position of the imaging unit and the position of the alignment mark on the image.