Wavefront analysis inspection apparatus and method

摘要

The present invention provides high-resolution wavefront measurement systems and methods for real-time inspection of optical and geometrical properties of specular and transparent objects, the systems of the invention comprising at least one illumination apparatus, at least one imaging apparatus constructed and configured to image the object onto an image plane, at least one gradient element disposed at one of the aperture stops of the imaging apparatus; and a sensor placed in the image plane of the imaging apparatus, wherein the sensor is capable of differentiating between different areas of the gradient element thereby being adapted to provide real-time optical and geometrical data of the object.

主权项

1. A gradient inspection system constructed and configured to inspect a wavefront exiting an object, the system comprising:
an illumination system constructed and configured to illuminate said object such that an angular coverage of light comprising a same pattern is received by each point of said object; an imaging system constructed and configured to image said object onto an image plane; at least one aperture stop of said imaging system; at least one conjugate plane associated with said at least one aperture stop; a gradient element comprising at least two distinct areas, each area enabling a passage of light of at least one of a defined spectrum and power therethrough, said gradient element being disposed in said at least one conjugate plane; and a sensor disposed in said image plane of said imaging system, said sensor comprising at least one pixel, said at least one pixel receiving an image of at least one related region of said object, wherein said sensor is capable of differentiating between said at least two distinct areas of said gradient element, and wherein at least one of a color characteristic and a gray level characteristic of said at least one pixel enables reconstruction of said wavefront at said at least one related region of said object, and wherein said gradient inspection system is thereby adapted to inspect properties of said object.