发明名称 |
OPTICAL CURABLE COMPOSITION FOR IMPRINTING, MANUFACTURING METHOD OF CURABLE FILM, MANUFACTURING METHOD OF OPTICAL COMPONENT, MANUFACTURING METHOD OF CIRCUIT BOARD AND MANUFACTURING METHOD OF ELECTRONIC COMPONENT |
摘要 |
PROBLEM TO BE SOLVED: To solve a problem that a condensation gas process tends to easily generate a defect such as pattern collapse compared to a process using no condensation gas.SOLUTION: The optical curable composition for imprinting used for imprinting under condensation gas atmosphere contains at least a polymerizable compound (A) and a photoinitiator (B), and satisfies the following formula (1): E≥2.30 GPa (1) (here, Erepresents complex elastic modulus (GPa) of the optical curable film which is obtained when the optical curable composition for the imprinting is exposed to an exposing amount of light 200 mJ/cmunder an atmosphere of condensation gas density of 90 vol.% or more).SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016119457(A) |
申请公布日期 |
2016.06.30 |
申请号 |
JP20150234307 |
申请日期 |
2015.11.30 |
申请人 |
CANON INC |
发明人 |
SAKAMOTO KAZUMI;ITO TOSHIKI;KATO JUN;YAMASHITA TAKASHI;IIMURA AKIKO |
分类号 |
H01L21/027;B29C59/04;C08F2/00;C08F2/50;C08F220/10 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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