摘要 |
Provided are a noncontact returning device and a noncontact absorption device such as a noncontact absorption panel, capable of precisely controlling a noncontact absorption state of a work. The noncontact returning device, absorbing and returning a thin work in a noncontact state, includes first and second noncontact absorption panels arranged in a return direction. Each of the first and second noncontact absorption panels includes: a rectangular porous pad including multiple absorption holes penetrated and extended in a thickness direction; and a holder having a rectangular shape and connected to the rear surface of the porous pad, including a grid pressure gas passage and a connection hole including multiple island parts, arranged and divided in a grid shape by the pressure gas passage, corresponding to the absorption holes, and extended by penetrating the island parts in a thickness direction, and having the island parts attached to the rear surface of the porous pad in a state, in which the connection hole is connected to the absorption holes of the porous pad, when connected to the porous pad. The pressure gas passage of the first noncontact absorption panel, placed in an upstream side of the return direction, is placed to be at least partially extended in an orthogonal direction to the return direction in a connection area with the second noncontact absorption panel placed in a downstream side of the return direction. |