发明名称 |
Semiconductor devices including guard ring structures |
摘要 |
A semiconductor device includes a substrate partitioned into a cell region, a peripheral circuit region, and an interface region between the cell region and the peripheral circuit region. A guard ring is provided in the interface region of the substrate and surrounds the cell region. A first gate structure is in the cell region, and a second gate structure is in the peripheral circuit region. |
申请公布号 |
US8928073(B2) |
申请公布日期 |
2015.01.06 |
申请号 |
US201313787147 |
申请日期 |
2013.03.06 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Jang Se-myeong;Han Sang-hyun;Ban Hyo-dong |
分类号 |
H01L29/66;H01L27/088;H01L21/8234 |
主分类号 |
H01L29/66 |
代理机构 |
Myers Bigel Sibley & Sajovec, P.A. |
代理人 |
Myers Bigel Sibley & Sajovec, P.A. |
主权项 |
1. A semiconductor device comprising:
a substrate including a cell region, a peripheral circuit region, and an interface region between the cell region and the peripheral circuit region; a guard ring formed in the interface region of the substrate and surrounding the cell region, wherein the guard ring comprises a portion of the substrate at an upper surface of the substrate and is defined by two adjacent isolation layers at the upper surface of the substrate; a first gate structure in the cell region; and a second gate structure in the peripheral circuit region. |
地址 |
KR |