发明名称 Semiconductor devices including guard ring structures
摘要 A semiconductor device includes a substrate partitioned into a cell region, a peripheral circuit region, and an interface region between the cell region and the peripheral circuit region. A guard ring is provided in the interface region of the substrate and surrounds the cell region. A first gate structure is in the cell region, and a second gate structure is in the peripheral circuit region.
申请公布号 US8928073(B2) 申请公布日期 2015.01.06
申请号 US201313787147 申请日期 2013.03.06
申请人 Samsung Electronics Co., Ltd. 发明人 Jang Se-myeong;Han Sang-hyun;Ban Hyo-dong
分类号 H01L29/66;H01L27/088;H01L21/8234 主分类号 H01L29/66
代理机构 Myers Bigel Sibley & Sajovec, P.A. 代理人 Myers Bigel Sibley & Sajovec, P.A.
主权项 1. A semiconductor device comprising: a substrate including a cell region, a peripheral circuit region, and an interface region between the cell region and the peripheral circuit region; a guard ring formed in the interface region of the substrate and surrounding the cell region, wherein the guard ring comprises a portion of the substrate at an upper surface of the substrate and is defined by two adjacent isolation layers at the upper surface of the substrate; a first gate structure in the cell region; and a second gate structure in the peripheral circuit region.
地址 KR