| 摘要 |
PROBLEM TO BE SOLVED: To provide a filter inspection system of an exhaust filter unit group, which allows leak inspection of individual exhaust filter units without preliminarily installing a scanning probe device within each exhaust filter unit, and to provide an exhaust filter unit.SOLUTION: In the filter inspection system of an exhaust filter unit group 16 of many exhaust filter units 15 which are installed in a clean zone 10 to discharge air in the clean zone 10, a probe scanning device 30 is freely removably supported in each exhaust filter unit 15. The probe scanning device 30 is installed at least one exhaust filter unit in the exhaust filter unit group 16 and is moved into another exhaust filter unit 15 to perform filter leak inspection of this exhaust filter unit 15. |
