| 摘要 |
The beam angle of a second direction is measured by a simply configuration. An ion beam measuring device (100) includes a mask for changing an original ion beam (B) into a measurement ion beam (Bm) which includes a long y beam part in a y direction vertical to an ion beam progressing direction and a long x beam part vertical to the progressing direction and the y direction, a detection part (104) which detects the x direction position of the y beam and the y direction position of the x beam part, and a beam angle calculation part (108) which calculates an x direction beam angle by using the x direction position and a y direction beam angle by using the y direction position. |
