| 摘要 |
<p>The present invention relates to a substrate inspection method which can efficiently inspect a pad area of a substrate. The substrate inspection method comprises the steps of: determining and registering a pixel at an initial point by sensing the change of gray scale of pixels arranged on a boundary line in an image of the pad area of the substrate; tracing and registering pixels having the gray scale identical to that of the pixel at the initial point; setting an area where the registered pixels are arranged as a boundary area; designating a pixel at the next point with a certain directional code based on a pixel at the present point among the pixels in the boundary area; extracting a coordinate of a maximum-distance pixel by calculating distances to the pixel at the initial point, to a pixel at a converting point of the directional code, and to a pixel at a recently registered point respectively; and detecting defects on the pad area by comparing the coordinate of the maximum-distance pixel and coordinates of the pixels arranged on the boundary line, and a coordinate of the pixel of the initial point and a coordinate of the pixel of the last point.</p> |
