Target supply device

摘要

A target supply device may include a tank having a nozzle, a first electrode provided with a first through-hole, a second electrode provided with a second through-hole, a third electrode disposed within the tank, an anchoring portion configured to anchor the first electrode and the second electrode to the tank so that insulation among the nozzle, the first electrode, and the second electrode is maintained, and so that a center axis of the nozzle is positioned within the first through-hole and the second through-hole, a first projecting portion that is an integrated part of at least one of the first electrode and the second electrode and that is configured to project toward the nozzle, and a second projecting portion that is an integrated part of at least the second electrode and that is configured to project so as to be positioned between the first electrode and the second electrode.

主权项

1. A target supply device comprising:
a tank including a nozzle; a first electrode provided with a first through-hole; a second electrode provided with a second through-hole; a third electrode disposed within the tank; an anchoring portion configured to anchor the first electrode and the second electrode to the tank so that the nozzle remains insulated from the first electrode, the nozzle remains insulated from the second electrode, and the first electrode remains insulated from the second electrode, and so that a center axis of the nozzle is positioned within the first through-hole and the second through-hole; a first projecting portion that is an integrated part of at least one of the first electrode and the second electrode, and that is configured to project toward the nozzle; and a second projecting portion that is an integrated part of at least the second electrode of the first electrode and the second electrode, and that is configured to project so as to be positioned between the first electrode and the second electrode, wherein the anchoring portion is formed in an approximately cylindrical shape extending along a direction in which a target material is extracted from the nozzle; the first electrode includes:
a first plate-shaped portion that is formed in an approximate plate shape having the first through-hole, and whose end on an outer side in a planar direction of the first plate-shaped portion is anchored to the anchoring portion;an approximately cylindrical first cylindrical portion that is an integrated part of the first plate-shaped portion and extends toward the nozzle; andan approximately cylindrical second cylindrical portion that is an integrated part of the first plate-shaped portion and extends away from the nozzle; the second electrode includes:
a second plate-shaped portion that is formed in an approximate plate shape having the second through-hole, and whose end on an outer side in a planar direction of the second plate-shaped portion is anchored to the anchoring portion; andan approximately cylindrical third cylindrical portion that is an integrated part of the second plate-shaped portion and extends toward the nozzle; the first projecting portion is configured of the first cylindrical portion; and the second projecting portion is configured of the second cylindrical portion and the third cylindrical portion, and is provided so that a leading end of one of the second cylindrical portion and the third cylindrical portion is positioned within the other of the second cylindrical portion and the third cylindrical portion.