发明名称 ノズル調整治具
摘要 PROBLEM TO BE SOLVED: To easily adjust a pair of cooling water nozzles at an optimal position to a cutting blade.SOLUTION: A nozzle adjusting jig (8) is mounted to a stationary flange (332) mounted to a tip of a spindle (31) instead of a cutting blade (34), so as to adjust front and rear positions of a pair of cooling water nozzles (71) arranged to sandwich the cutting blade (34). The nozzle adjusting jig (8) is mounted to a support face (333) of the stationary flange (332) by a magnetic force, and the cooling water nozzle (71) positioned in front of the cutting blade (34) is brought into contact with the nozzle adjusting jig (8), so as to properly adjust the front and rear positions of the pair of cooling water nozzles (71) to the cutting blade (34).
申请公布号 JP5947605(B2) 申请公布日期 2016.07.06
申请号 JP20120093763 申请日期 2012.04.17
申请人 株式会社ディスコ 发明人 吉田 圭吾
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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