| 摘要 |
<p>The present invention provides a three-dimensional optical steering device capable of maintaining a small focal spot size while three-dimensionally scanning the focus of parallel rays, such as a laser beam. The three-dimensional optical steering device includes a Z scanner configured to convert parallel rays into an emitting beam; an XY scanner configured to polarize the emitting beam to a direction perpendicular to an optical axis; and an object lens configured to form the focus of the polarized emitting beam, wherein the object lens is preferably a finite conjugate lens, an aperture is on an object side, an object plane is a part of a spherical surface having a finite radius, and the center of the spherical surface is positioned on the center of the aperture.</p> |
