| 发明名称 | Sensor with energy-harvesting device | ||
| 摘要 | A method of fabricating a device includes forming a moveable plate over a substrate, and forming an energy harvesting coil in the moveable plate. The method further includes forming at least one connector connecting the movable plate with the energy harvesting coil, wherein a portion of the energy harvesting coil extends along the at least one connector. The method further includes forming electrodes around the moveable plate, the electrodes adapted to sense motion of the moveable plate. | ||
| 申请公布号 | US8928162(B2) | 申请公布日期 | 2015.01.06 |
| 申请号 | US201414229068 | 申请日期 | 2014.03.28 |
| 申请人 | Taiwan Semiconductor Manufacturing Company, Ltd. | 发明人 | Chung Tien-Kan;Tai Wen-Chuan;Huang Yao-Te;Huang Hsin-Ting;Tsai Shang-Ying;Yang Chang-Yi;Hung Chia-Ming |
| 分类号 | H02P9/04;H02K15/00;G01P15/11 | 主分类号 | H02P9/04 |
| 代理机构 | Lowe Hauptman & Ham, LLP | 代理人 | Lowe Hauptman & Ham, LLP |
| 主权项 | 1. A method of fabricating a device comprising: forming a moveable plate over a substrate; forming an energy harvesting coil in the moveable plate; forming at least one connector connecting the movable plate with the substrate, wherein a portion of the energy harvesting coil extends along the at least one connector; and forming electrodes around the moveable plate, the electrodes adapted to sense motion of the moveable plate. | ||
| 地址 | TW | ||