193NM laser and inspection system

摘要

A laser for generating an output wavelength of approximately 193.4 nm includes a fundamental laser, an optical parametric generator, a fourth harmonic generator, and a frequency mixing module. The optical parametric generator, which is coupled to the fundamental laser, can generate a down-converted signal. The fourth harmonic generator, which may be coupled to the optical parametric generator or the fundamental laser, can generate a fourth harmonic. The frequency mixing module, which is coupled to the optical parametric generator and the fourth harmonic generator, can generate a laser output at a frequency equal to a sum of the fourth harmonic and twice a frequency of the down-converted signal.

主权项

1. A laser for generating an output wavelength of approximately 193.4 nm, the laser comprising:
a fundamental laser; an optical parametric generator, coupled to the fundamental laser, for generating a down-converted signal; a fourth harmonic generator, coupled to the optical parametric generator, for generating a fourth harmonic; and a frequency mixing module, coupled to the optical parametric generator and the fourth harmonic generator, for generating a laser output of a frequency equal to a sum of the fourth harmonic and twice a frequency of the down-converted signal, wherein the frequency mixing module comprises two non-linear crystals, a first non-linear crystal configured to generate a frequency equal to a sum of the fourth harmonic and the frequency of down-converted signal by type-II conversion, and a second non-linear crystal configured to generate the frequency equal to the sum of the fourth harmonic and the twice the frequency of the down-converted signal by type-I conversion.